STN-4B6 TYPE PVD COATING EQUIPMENT
★ The STN-4B6 type PVD Coating Equipment has been specially designed for PVD hard-coating, for this purpose the unit is equipped with 8 arc ion sources .
★ The extreme high rate of ionization in arc evaporation technology provides excellent adhesion properties of the coating to the substrate surface and dense, strong layers.
★ For the required hard-coating the system is provided with Titanium targets and Titanium-Nitride (TiN) process.
★ Other coatings can be realized by choice of the right target material and appropriate process control.
★ The advanced Controlled Arc system with controlled steering of the arc ensures a smooth and homogeneous layer. The controlled Arc-system also provides high coating uniformity and excellent target utilization efficiency.
★ The process is running fully automatically by a Programmable Logic Control-unit.
★ Chamber, vacuum system, gas flow and controls are chosen of first class design and ensure a reliable, repeatable production with high system availability.
GENERAL SPECIFICATIONS OF STN-4B6
★ Process chamber
Vacuum Chamber Inner Size Φ800*H 800 mm
Stainless steel, double walled, water cooled
One front door, water cooled front door with the same curve as the cylinder chamber in order to strengthen its rigidity. Two view ports on the door cooling by water
Substrate heating, Power 12 kW effective <!--[endif]-->
Temperature control by thermo-couples
★ Pumping system
One Oil Diffusion Pump 7800L/s s
One Roots Vacuum Pump 150L/s
Two Rotary Vane Pump 30L/s & 15L/s
★ Cathodes Arc Ion Sources
Number Arc: 6
Type: Advanced Controlled Arc
Target size: Φ100 x 40 mm
Position: around chamber
Power supplies: 14, DC, max .160 A
★ Electronic
- Arc-ignition Effective
★ Turntable
Loading capacity coating zone: Φ600*H 600mm
Max. Weight: 200kg
Satellite axis 24 with integrated 6 rotation
Satellite diameter:Φ 300mm/Φ 130mm
★ Control system
Process control Fully automatic by color Programmable Logic Control (PLC)
★ Operation Cycle time
Less than 35 min