Description
Ionization source & Bias power supply
No. of targets:16~26;
Power of BIAS: 30kW~45kW.
The proposed coating system is the PVD COATING SYSTEM TYPE STN-20D30. The STN-20D30 has an enlarged loadingcapacity and has been specially designed for large volume products decorative coating. For large volume products the STN-20D30 offers an unsurpassed productivity. This equipment is especially developed for those applications requiring extreme large coating space, high loading capacity, low temperatures (<300 ℃) and short cycle times. This makes this system especially well suited for decorative parts.The vacuum chamber unit has a cylinder design with one door opened on the top of the process chamber and 26 (twenty-six) cathode Arc Ion Sources.Inner size of the chamber --- Diameter: 1500~1800mm?Height: 2000mm~3500mm
Vacuum pumping system --- Oil diffusion pump + Root's pump + Rotary pump
Controlling system --- PLC & Touch Screen OR PLC & PC
| Specification |
| Model |
STN-20FD30 |
| Process Chamber |
Φ1800mm*H3500mm |
| Pumping System |
|
| Backing Pump |
Rotary vane pump with 252m3/h (4 set) |
| Roots Pump |
Roots pump with 1080m3/h (2 set) |
| Diffusion Pump |
Oil diffusion pump with 81000m3/h (2 set) |
| Hold Pump |
Rotary vane pump with 108m3/h (2 set) |
| System Control |
PLC touch screen & PC control |
| Cathodes |
26 unit |
| Cathodes Power |
Max 160A |
| Bias Power Supply |
180KW,0-1000V |
| Process Gas System |
|
| 500sccm |
2 unit |
| 1000sccm |
2 unit |
| Heating System |
0-24KW , PID contol |
| Power |
380V three phase four line |
| Turntable |
|
| Driving System |
6*4unit,rotation,revolution |
| Driving Control |
0-18rpm (variable) |
| Cooling Water System |
PL-08 (optional) |
| Oven |
8KW,800*800*1000mm (optional) |
Currency: USD Unit Price: 250000 Quantity: 1 Delivery: 150 Days